Investigation of rapid-thermal-oxidized porous silicon

Li, K.-H.; Tsai, C.; Campbell, J.C.; Hance, B.K.; White, J.M.
June 1993
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3501
Academic Journal
Examines rapid-thermal-oxidized porous silicon (Si). Observation of room-temperature visible photoluminescence (PL); Comparison between the properties of an oxidized and an anodized porous Si; Determination of PL uniformity prior to the annealing process.


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