Ultrathin textured polycrystalline oxide with a high electron conduction efficiency prepared by

Shye Lin Wu; Chung Len Lee; Tan Fu Lei
June 1993
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3491
Academic Journal
Examines ultrathin textured polycrystalline oxide with a high electron conduction efficiency prepared by thermal oxidation of thin polycrystalline silicon film. Comparison between textured and normal polyoxides; Description of polyoxide properties; Demonstration of the Fowler-Nordheim tunneling current density.


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