TITLE

Ultrathin textured polycrystalline oxide with a high electron conduction efficiency prepared by

AUTHOR(S)
Shye Lin Wu; Chung Len Lee; Tan Fu Lei
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3491
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines ultrathin textured polycrystalline oxide with a high electron conduction efficiency prepared by thermal oxidation of thin polycrystalline silicon film. Comparison between textured and normal polyoxides; Description of polyoxide properties; Demonstration of the Fowler-Nordheim tunneling current density.
ACCESSION #
4329811

 

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