Rutherford backscattering analysis of phosphorus gettering of gold and copper

Hartiti, B.; Hage-Ali, M.; Muller, J.C.; Siffert, P.
June 1993
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3476
Academic Journal
Investigates the Rutherford backscattering analysis of gold (Au) and copper (Cu) phosphorus gettering. Accumulation of Au and Cu in the phosphorus-doped region; Effect of metallic impurities on electrical devices; Confirmation on the existence of classical and rapid thermal gettering effect.


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