TITLE

Rutherford backscattering analysis of phosphorus gettering of gold and copper

AUTHOR(S)
Hartiti, B.; Hage-Ali, M.; Muller, J.C.; Siffert, P.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3476
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the Rutherford backscattering analysis of gold (Au) and copper (Cu) phosphorus gettering. Accumulation of Au and Cu in the phosphorus-doped region; Effect of metallic impurities on electrical devices; Confirmation on the existence of classical and rapid thermal gettering effect.
ACCESSION #
4329806

 

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