TITLE

Strain relaxation and mosaic structure in relaxed SiGe layers

AUTHOR(S)
Mooney, P.M.; LeGoues, F.K.; Chu, J.O.; Nelson, S.F.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3464
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines strain relaxation and mosaic structure in relaxed silicon germanide (SiGe) alloy layers. Use of high-resolution x-ray diffraction in characterizing strained SiGe layers and superlattices; Determination of the importance of mosaic structure; Discussion on the effect of threading dislocations on the x-ray peak widths.
ACCESSION #
4329802

 

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