TITLE

Electrical characteristics of plasma loaded, radio frequency driven, capacitively coupled

AUTHOR(S)
Forster, John
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/28/1993, Vol. 62 Issue 26, p3429
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electrical characteristics of plasma loaded, radio frequency driven, capacitively coupled electrodes. Use of a nonlinear circuit model to study impedance and harmonic generation; Application of a harmonic balance technique in studying the electrical properties of a plasma loaded electrode; Shortcomings of the circuit model.
ACCESSION #
4329790

 

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