TITLE

Self-consistent fluid modeling of radio frequency discharges in two dimensions

AUTHOR(S)
Dalvie, M.; Surendra, M.; Selwyn, G.S.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/14/1993, Vol. 62 Issue 24, p3207
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the fluid modeling results of radio frequency (rf) discharges using a cylindrical oscillator. Composition of the rf device; Influence of two-dimensional fluid effect on the ionization rate; Use of optical emission spectroscopy for emission rate enhancement.
ACCESSION #
4329777

 

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