TITLE

High resolution x-ray diffraction of periodic surface gratings

AUTHOR(S)
van der Sluis, P.; Binsma, J.J.M.; van Dongen, T.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/14/1993, Vol. 62 Issue 24, p3186
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates high resolution x-ray diffraction of periodic surface gratings. Approximation of optimal geometry by 113 reflection measurement; Influence of reflection asymmetry on beam compression; Use of Ewald sphere section to depict low angular detector resolution.
ACCESSION #
4329770

 

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