TITLE

Novel shadow mask molecular beam epitaxial regrowth technique for selective doping

AUTHOR(S)
Gulden, K.H.; Wu, X.; Smith, J.S.; Kiesel, P.; Hofler, A.; Kneissl, M.; Riel, P.; Dohler, G.H.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/14/1993, Vol. 62 Issue 24, p3180
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a molecular beam epitaxial regrowth technique for selective doping. Fabrication of n-i-p-i modulator structures; Use of silicon (Si) shadow mask for doping profiles; Influence of mechanical stability on Si mass.
ACCESSION #
4329768

 

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