TITLE

A High resolution Si position sensor

AUTHOR(S)
Scott, K.A.M.; Sharma, A.K.; Wilson, C.M.; Mullins, B.W.; Soares, S.F.; Brueck, S.R.J.
PUB. DATE
June 1993
SOURCE
Applied Physics Letters;6/14/1993, Vol. 62 Issue 24, p3141
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the planar back-to-back Schottky-barrier silicon position sensor. Vibration-limited optical-position sensitivity of the device; Relation between circuit photocurrent response and detector gap; Response time of the unbiased device.
ACCESSION #
4329754

 

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