TITLE

In situ, rf plasma deposition of Bi[sub 2]Sr[sub 2]Ca[sub 2]Cu[sub 3]O[sub x] thin films at

AUTHOR(S)
Shah, A.; Patel, S.; Narumi, E.; Shaw, D.T.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/10/1993, Vol. 62 Issue 19, p2422
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the in situ, radio-frequency plasma deposition of superconducting Bi[sub 2]sr[sub 2]ca[sub 2]Cu[sub 3]O[sub x] thin films at atmospheric pressure. Steps added to the argon-oxygen plasma deposition process; Importance of controlling the substrate block temperature; Effect of plasma treatment on the film.
ACCESSION #
4329718

 

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