TITLE

High-resolution x-ray diffraction to determine the self-limiting growth in atomic layer epitaxy

AUTHOR(S)
Tran, C.A.; Masut, R.A.; Brebner, J.L.; Leonelli, R.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/10/1993, Vol. 62 Issue 19, p2375
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Characterizes the self-limiting growth in atomic layer epitaxy of InP and InAs/InP heterostructures. Use of high-resolution x-ray diffraction; Determination of the growth per cycle and film thickness; Optical and crystalline properties of the heterostructures.
ACCESSION #
4329702

 

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