Water trapping of point defects in interlayer SiO[sub 2] films and its contribution to the

Takahashi, Jun-ichi; Machida, Katsuyuki; Shimoyama, Nobuhiro; Minegishi, Kazusige
May 1993
Applied Physics Letters;5/10/1993, Vol. 62 Issue 19, p2365
Academic Journal
Examines the link between the water blocking effect and the point defect in electron cyclotron resonance plasma chemical vapor deposition silica films. Detection of the electron spin resonance signal; Water trapping ability of the silicon dangling bonds; Implications for hot-carrier degradation prevention in devices.


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