TITLE

Water trapping of point defects in interlayer SiO[sub 2] films and its contribution to the

AUTHOR(S)
Takahashi, Jun-ichi; Machida, Katsuyuki; Shimoyama, Nobuhiro; Minegishi, Kazusige
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/10/1993, Vol. 62 Issue 19, p2365
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the link between the water blocking effect and the point defect in electron cyclotron resonance plasma chemical vapor deposition silica films. Detection of the electron spin resonance signal; Water trapping ability of the silicon dangling bonds; Implications for hot-carrier degradation prevention in devices.
ACCESSION #
4329697

 

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