TITLE

Heterogeneous formation of atomic hydrogen in hot-filament diamond deposition

AUTHOR(S)
Wolden, C.; Gleason, K.K.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/10/1993, Vol. 62 Issue 19, p2329
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the heterogenous formation of atomic hydrogen in the hot-filament chemical vapor deposition of diamond films. Importance of heterogenous and homogenous chemistry in atomic hydrogen production; Development of a kinetic expression to explain the catalytic atomic hydrogen production; Effect of recombination of hydrogen atoms at the growing surface.
ACCESSION #
4329685

 

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