KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as

Foulon, F.; Stuke, M.
May 1993
Applied Physics Letters;5/3/1993, Vol. 62 Issue 18, p2173
Academic Journal
Demonstrates the use of krypton fluoride excimer laser images of mask patterns to deposit aluminum on various substrates. Increase of deposited height with laser energy; Rates of depositions; Generation of patterns with one micrometer resolution.


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