Monolithic integration of a vertical cavity surface emitting laser and a metal semiconductor

Yang, Y.J.; Dziura, T.G.; Bardin, T.; Wang, S.C.; Fernandez, R.; Liao, Andrew S.H.
February 1993
Applied Physics Letters;2/8/1993, Vol. 62 Issue 6, p600
Academic Journal
Examines the monolithic integration of a vertical cavity surface emitting laser and a metal semiconductor field effect transistor. Effects of the conductive n-type substrate on optoelectronic integrated circuit (OEIC); Diagram of the OEIC structure; Fabrication process of the OEIC.


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