TITLE

Homoepitaxial growth of diamond thin films by electron cyclotron-resonance microwave plasma

AUTHOR(S)
Komori, Masaaki; Maki, Tetsuro; Taigen Kim; Gen Liang Hou; Sakaguchi, Yoshiyuki; Sakuta, Ken; Kobayashi, Takeshi
PUB. DATE
February 1993
SOURCE
Applied Physics Letters;2/8/1993, Vol. 62 Issue 6, p562
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the homoepitaxial growth of diamond thin films. Use of electron-cyclotron-resonance microwave plasma chemical-vapor-deposition apparatus; Surface morphology of the (100) oriented film; Uniformity of epitaxial films grown in synthetic diamond substrates.
ACCESSION #
4329559

 

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