TITLE

Electron-temperature control by movable pins installed in a hollow cathode for discharge plasmas

AUTHOR(S)
Sato, N.; Iizuka, S.; Koizumi, T.; Takada, T.
PUB. DATE
February 1993
SOURCE
Applied Physics Letters;2/8/1993, Vol. 62 Issue 6, p567
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the use of pin-hollow cathodes to control the electron energy distributions in discharge plasmas. Variation of the pin length in the hollow cathode; Relation between pin length and electron temperature; Change of local plasma structure.
ACCESSION #
4329554

 

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