Radial flow effects in a multidimensional, three-moment fluid model of radio frequency glow

Young, Fongray F.; Chwan-Hwa Wu
February 1993
Applied Physics Letters;2/1/1993, Vol. 62 Issue 5, p473
Academic Journal
Describes the use of a two-dimensional self-consistent nonequilibrium fluid model in radio frequency glow discharge simulation. Evaluation of the radial and axial flow dynamic effects in a cylindrically symmetric geometry; Correlation between radial sheath width and gas pressure; Implication of nonuniform plasma density profile for plasma processing.


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