TITLE

Transmission electron microscopy study of chemically etched porous Si

AUTHOR(S)
Shih, S.; Jung, K.H.; Qian, R.-Z.; Kwong, D.L.
PUB. DATE
February 1993
SOURCE
Applied Physics Letters;2/1/1993, Vol. 62 Issue 5, p467
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops an approach for the examination of chemically etched (CE) porous silicon layer by transmission electron microscopy (TEM). Fabrication of the CE layer following plan-view TEM sample preparation; Existence of crystalline, polycrystalline and amorphous phases; Transition of microstructure from crystalline to amorphous during chemical etching.
ACCESSION #
4329519

 

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