Different types of pore structure in porous silicon

Parkhutik, V.P.; Albella, J.M.; Martinez-Duart, J.M.; Gomez-Rodriguez, J.M.; Baro, A.M.; Shershulsky, V.I.
January 1993
Applied Physics Letters;1/25/1993, Vol. 62 Issue 4, p366
Academic Journal
Examines the morphology of pores formed in porous silicon layer by anodic polarization in hydrofluoric acid. Types of pore structure; Formation of passive oxide layer at the bottom of each pore; Possibility of changing porosity type.


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