Strong piezoelectricity in nanosized silicon nitride prepared by laser-induced chemical vapor

Wei-Xiang Wang; Dao-Huo Li; Zong-Cai Liu; Song-Hao Liu
January 1993
Applied Physics Letters;1/18/1993, Vol. 62 Issue 3, p321
Academic Journal
Examines the laser-induced chemical vapor deposition (LICVD) processed nano-Si[sub 3]N[sub 4]. Evidence of strong piezoelectric effects; Attribution of LICVD nano-Si[sub 3]N[sub 4] piezoelectricity to charge accumulation in interfaces and surfaces of microvoids; Discussion on the metastability of the silicon nitride powder.


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