Ion beam synthesis of cubic FeSi[sub 2]

Desimoni, J.; Bernas, H.; Behar, M.; Lin, X.W.; Washburn, J.; Liliental-Weber, Z.
January 1993
Applied Physics Letters;1/18/1993, Vol. 62 Issue 3, p306
Academic Journal
Examines the ion beam synthesis of iron disilicide. Occurrence of cubic precipitates as shown in high resolution electron microscopy; Avoidance of channeled implantation; Superimposition of weak spot regular arrays on silicon spots.


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