TITLE

Determination of the residual stress tensor in Cu/W multilayers by x-ray diffraction

AUTHOR(S)
Goudeau, Ph.; Badawi, K.F.; Naudon, A.; Gladyszewski, G.
PUB. DATE
January 1993
SOURCE
Applied Physics Letters;1/18/1993, Vol. 62 Issue 3, p246
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the residual stress tensor in Cu/W multilayers through x-ray diffraction. Method used for x-ray diffraction; Determination of the residual stress state by measurement of interplanar distance; Calculation of tungsten lattice structure from strains.
ACCESSION #
4329443

 

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