In situ growth of superconducting YBa[sub 2]Cu[sub 3]O[sub 7-delta] thin films by a hot-wall

Lin, R.J.; Chen, L.J.
January 1993
Applied Physics Letters;1/4/1993, Vol. 62 Issue 1, p105
Academic Journal
Examines the in situ growth of superconducting YBa[sub 2]Cu[sub 3]O[sub 7-x] thin films. Use of a modified high pressure direct current planar diode sputtering process; Characterization of the film surface; Production of superconducting thin films at a substrate temperature.


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