TITLE

In situ growth of superconducting YBa[sub 2]Cu[sub 3]O[sub 7-delta] thin films by a hot-wall

AUTHOR(S)
Lin, R.J.; Chen, L.J.
PUB. DATE
January 1993
SOURCE
Applied Physics Letters;1/4/1993, Vol. 62 Issue 1, p105
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the in situ growth of superconducting YBa[sub 2]Cu[sub 3]O[sub 7-x] thin films. Use of a modified high pressure direct current planar diode sputtering process; Characterization of the film surface; Production of superconducting thin films at a substrate temperature.
ACCESSION #
4329428

 

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