TITLE

Ion induced chemical bonding of carbon with Ta as studied by Auger electron spectroscopy and

AUTHOR(S)
Sharma, J.K.N.; Bera, Santanu; Chakraborty, B.R.
PUB. DATE
December 1991
SOURCE
Applied Physics Letters;12/16/1991, Vol. 59 Issue 25, p3247
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the chemical bonding of carbon with tantalum (Ta) using Auger electron spectroscopy and slow electron energy loss spectroscopy (SEELS). Effect of carbide formation in Ta[sub 2]O[sub 5] films; Distinction of the SEELS of the Ta with graphitic carbon; Detection of carbide formation.
ACCESSION #
4329313

 

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