Ion induced chemical bonding of carbon with Ta as studied by Auger electron spectroscopy and

Sharma, J.K.N.; Bera, Santanu; Chakraborty, B.R.
December 1991
Applied Physics Letters;12/16/1991, Vol. 59 Issue 25, p3247
Academic Journal
Examines the chemical bonding of carbon with tantalum (Ta) using Auger electron spectroscopy and slow electron energy loss spectroscopy (SEELS). Effect of carbide formation in Ta[sub 2]O[sub 5] films; Distinction of the SEELS of the Ta with graphitic carbon; Detection of carbide formation.


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