In situ definition of semiconductor structures by selective area growth and etching

Colas, E.; Caneau, C.; Frei, M.; Clausen Jr, E.M.; Quinn, W.E.; Kim, M.S.
October 1991
Applied Physics Letters;10/14/1991, Vol. 59 Issue 16, p2019
Academic Journal
Examines semiconductor structures by selective area growth and etching. Utilization of selective area growth by low-pressure organometallic chemical vapor deposition; Modulation of the local growth rate; Significance of the technique application to emission wavelength.


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