On-chip magnetoresistive detection of resonance in microcantilevers

Patil, S. B.; Guedes, A.; Freitas, P. P.; Cardoso, S.; Chu, V.; Conde, J. P.
July 2009
Applied Physics Letters;7/13/2009, Vol. 95 Issue 2, p023502
Academic Journal
Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 Ã…/Hz1/2.


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