Resonance control of membrane reflectors with effective index engineering

Hongjun Yang; Chuwongin, Santhad; Zexuan Qiang; Li Chen; Huiqing Pang; Zhenqiang Ma; Weidong Zhou
July 2009
Applied Physics Letters;7/13/2009, Vol. 95 Issue 2, p023110
Academic Journal
We report here broadband membrane reflectors based on Fano resonances in patterned silicon nanomembranes. Resonance control of the reflectors was realized either by partially removing buried oxide layer underneath the device layer or by controlled SiO2 film deposition on top of the devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance engineering for both narrowband filters and ultracompact broadband reflectors.


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