Electrical properties of Y-doped CaCuO[sub 2] films prepared by organometallic chemical vapor

Kobayashi, Kenkichiro; Ishihara, Yozo; Matsushima, Shigenori; Okada, Genji
May 1993
Applied Physics Letters;5/31/1993, Vol. 62 Issue 22, p2868
Academic Journal
Examines the formation of Y-doped CaCuO[sub 2] films in terms of its electrical characteristics. Application of organometallic chemical vapor deposition of the films; Comparison on undoped and doped CaCuO[sub 2] using resistivity as a parameter; Role of chelates in controlling the rate of deposition.


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