Direct observation of porous SiC formed by anodization in HF

Shor, Joseph S.; Grimberg, Ilana; Weiss, Ben-Zion; Kurtz, Anthony D.
May 1993
Applied Physics Letters;5/31/1993, Vol. 62 Issue 22, p2836
Academic Journal
Demonstrates the anodization process of porous silicon carbide (SiC). Extraction of porous silicon from single-crystal SiC wafers; Employment of ultraviolet illumination in the experiment; Use of transmission electron microscopy in observing porous SiC.


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