TITLE

Direct observation of porous SiC formed by anodization in HF

AUTHOR(S)
Shor, Joseph S.; Grimberg, Ilana; Weiss, Ben-Zion; Kurtz, Anthony D.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/31/1993, Vol. 62 Issue 22, p2836
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the anodization process of porous silicon carbide (SiC). Extraction of porous silicon from single-crystal SiC wafers; Employment of ultraviolet illumination in the experiment; Use of transmission electron microscopy in observing porous SiC.
ACCESSION #
4323244

 

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