Kinetics of hydrogen desorption in surface-limited thin-film growth of SiGe alloys

Sharp, J.W.; Eres, Gyula
May 1993
Applied Physics Letters;5/31/1993, Vol. 62 Issue 22, p2807
Academic Journal
Examines the kinetics of hydrogen desorption in surface-limited thin film growth of silicon germanide alloys from binary mixtures of disilane and digermane. Use of surface differential reflectance; Components consisting the hydrogen desorption process from the alloy surface; Measurement of the desorption rates of the components.


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