Polycrystalline AlN films of fine crystallinity prepared by ion-beam assisted deposition

Jie Yang; Chen Wang; Xinshui Yan; Kun Tao; Baixin Liu; Yudian Fan
May 1993
Applied Physics Letters;5/31/1993, Vol. 62 Issue 22, p2790
Academic Journal
Examines the structure of polycrystalline aluminum nitride films synthesized by electron gun evaporation into silicon wafer and glassy carbon, with ion beam bombardment. Techniques used to characterize the material; Correlation of the experimental parameters, resulted structure and stoichiometry of the films.


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