TITLE

Visualization of a gas flow instability in spin coating systems

AUTHOR(S)
Wahal, Sanjay; Oztekin, Alparslan; Bornside, David E.; Brown, Robert A.; Seidel, Philip K.; Ackmann, Paul W.; Geyling, Franz T.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2584
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the gas flow near the surface of a rotating disk in an industrial spin coating apparatus using flow visualization. Presence of the Ekman-like flow instability in the system; Link between the flow instability and nonuniformity of the final dried film; Importance of flow instabilities on the uniformity of the film.
ACCESSION #
4323210

 

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