TITLE

Submicron electrically conducting wires produced in polyimide by ultraviolet laser irradiation

AUTHOR(S)
Phillips, H.M.; Wahl, S.; Sauerbrey, R.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2572
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electrically conducting lines produced in polyimide with KrF laser using the holographic method. Observation of the ohmic characteristics of the electrical resistivity of submicron structures; Dependence of wire conductivity on temperature.
ACCESSION #
4323205

 

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