Submicron electrically conducting wires produced in polyimide by ultraviolet laser irradiation

Phillips, H.M.; Wahl, S.; Sauerbrey, R.
May 1993
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2572
Academic Journal
Examines the electrically conducting lines produced in polyimide with KrF laser using the holographic method. Observation of the ohmic characteristics of the electrical resistivity of submicron structures; Dependence of wire conductivity on temperature.


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