TITLE

Polycrystalline silicon thin film transistors on Corning 7059 glass substrates using short time

AUTHOR(S)
Gang Liu; Fonash, Stephen J.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2554
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication process for polycrystalline silicon thin film transistors on 7059 glass substrates. Advantage of short processing time and low process temperature; Use of an ultrathin palladium layer; Reduction of crystallization time and temperature.
ACCESSION #
4323199

 

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