Real-time study of the reflection high energy electron diffraction specular beam intensity

Maa, B.Y.; Dapkus, P.D.; Chen, P.; Madhukar, A.
May 1993
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2551
Academic Journal
Examines the intensity behavior of specular beam in reflection high energy electron diffraction from GaAs (001). Exposure of trimethylgallium (TMGa) in the atomic layer epitaxy of GaAs; Surface reactions in atomic layer epitaxy; Simulation of longer time constant after short exposure to TMGa.


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