Atom probe compositional analysis of Co-Cr sputtered magnetic thin films

Hono, K.; Babu, S.S.; Maeda, Y.; Hasegawa, N.; Sakurai, T.
May 1993
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2504
Academic Journal
Analyzes the magnetic thin film sputter deposited on a heated copper coated silicon substrate in Co-Cr thin films. Composition of the films; Presence of compositional fluctuations in sputtered cobalt-chromium thin films; Observation of field ion microscopy images.


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