TITLE

Thermal imaging using the atomic force microscope

AUTHOR(S)
Majumdar, A.; Carrejo, J.P.; Lai, J.
PUB. DATE
May 1993
SOURCE
Applied Physics Letters;5/17/1993, Vol. 62 Issue 20, p2501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a technique for thermal imaging with submicrometer spatial resolution using the atomic force microscope. Simultaneous thermal and topographical imaging of biased electronic devices and interconnects; Detection of the deflection of the cantilever due to the tip-substrated interatomic forces.
ACCESSION #
4323180

 

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