TITLE

Determination of atomic density profiles in synthetic multilayers by anomalous x-ray diffraction

AUTHOR(S)
Zizhou Tang; Zengli Xu; Kevan, S.D.; Novet, Tom; Johnson, David C.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/12/1993, Vol. 62 Issue 15, p1771
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a method for determining the atomic density profiles in synthetic multilayers by anomalous x-ray diffraction. Measurement of the x-ray diffraction Bragg peak intensities; Deduction of Fourier coefficients; Interdiffusion of silicon into the titanium layers.
ACCESSION #
4323093

 

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