Ellipsometric study of boron nitride thin-film growth on Si(100)

Ren, S.L.; Rao, A.M.; Eklund, P.C.; Doll, G.L.
April 1993
Applied Physics Letters;4/12/1993, Vol. 62 Issue 15, p1760
Academic Journal
Examines the structure and optical properties of boron nitride thin films on silicon. Use of variable angle spectroscopic ellipsometry for incident angles; Calculation of the sensitivity of the ellipsometric parameters; Characterization of the outer layer.


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