TITLE

Ellipsometric study of boron nitride thin-film growth on Si(100)

AUTHOR(S)
Ren, S.L.; Rao, A.M.; Eklund, P.C.; Doll, G.L.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/12/1993, Vol. 62 Issue 15, p1760
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the structure and optical properties of boron nitride thin films on silicon. Use of variable angle spectroscopic ellipsometry for incident angles; Calculation of the sensitivity of the ellipsometric parameters; Characterization of the outer layer.
ACCESSION #
4323089

 

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