TITLE

Hydrogen interactions with delocalized spin centers in buried SiO[sub 2] thin films

AUTHOR(S)
Warren, W.L.; Schwank, J.R.; Shaneyfelt, M.R.; Fleetwood, D.M.; Winokur, P.S.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/5/1993, Vol. 62 Issue 14, p1661
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the nature of defects in irradiated bonded and etchback silicon-on-insulator buried silica thin films. Use of electron paramagnetic resonance method; Categorization of the defects; Role of irradiation in positive charge generation in the dielectric.
ACCESSION #
4323058

 

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