TITLE

Monte Carlo hydrodynamic simulation of neutral radical transport in low pressure remote plasma

AUTHOR(S)
Hartig, Michael J.; Kushner, Mark J.
PUB. DATE
April 1993
SOURCE
Applied Physics Letters;4/5/1993, Vol. 62 Issue 14, p1594
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a hybrid hydrodynamic Monte Carlo model for the transport of neutral excited states and radicals at low and intermediate pressures in remote plasma reactors. Uniformity of radical flux and hot atom effects; Attainment of an average advective flow field; Solution of continuity and momentum equations.
ACCESSION #
4323035

 

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