Rectification of force-distance curve using capacitance measurement

Naitou, Y.; Ogiso, H.; Ookubo, N.
February 2009
Applied Physics Letters;2/23/2009, Vol. 94 Issue 8, p083104
Academic Journal
We demonstrate the rectification of force spectroscopy in noncontact atomic force microscopy. The resonant frequency shift (Δf) in the probe oscillation and distance-modulated capacitance (dC/dZ) are simultaneously measured on thin dielectric films as a function of externally applied bias voltage and tip-sample distance Z. Analysis of dC/dZ spectroscopy has revealed that the probe-tip position shifts due to the attractive force acting between the tip and a sample. We show that the shifted Δf-Z curve can be rectified and the deformation of the probe tip can be quantitatively assessed.


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