Coupling efficiency of monolithic, waveguide-integrated Si photodetectors

Donghwan Ahn; Ching-yin Hong; Kimerling, Lionel C.; Michel, Jurgen
February 2009
Applied Physics Letters;2/23/2009, Vol. 94 Issue 8, p081108
Academic Journal
A waveguide-integrated photodetector provides a small-footprint, low-capacitance design that overcomes the bandwidth-efficiency trade-off problem of free space optics. High performance silicon devices are critical to the emergence of electronic-photonic integrated circuits on the complementary metal oxide semiconductor platform. We have fabricated vertical p-i-n silicon photodetectors that are monolithically integrated with compact silicon oxynitride channel waveguides. We report over 90% coupling efficiency of 830 nm light from the silicon oxynitride (SiOxNy) channel waveguide to the silicon photodetector. We analyze the dependence of coupling on waveguide index by comparing coupling from low index-contrast waveguides and high index-contrast waveguides.


Related Articles

  • Systematic investigation of InAs/InP quantum-dash based lasers under external optical feedback. Azouigui, S.; Dagens, B.; Lelarge, F.; Accard, A.; Make, D.; Le Gouezigou, O.; Merghem, K.; Martinez, A.; Zou, Q.; Ramdane, A. // Applied Physics Letters;5/19/2008, Vol. 92 Issue 20, p201106 

    The tolerance to optical feedback of InAs/InP quantum dash-based lasers is reported for several structures exhibiting differing values of the linewidth enhancement factor and damping factor. An analysis of the onsets of coherence collapse is carried out based on the experimental dynamic...

  • Integrated plasmonic lens photodetector. Shackleford, James A.; Grote, Richard; Currie, Marc; Spanier, Jonathan E.; Nabet, Bahram // Applied Physics Letters;2/23/2009, Vol. 94 Issue 8, p083501 

    We present a fabricated metal-semiconductor-metal (MSM) photodetector exhibiting an enhanced photocurrent by integrating a nanoscale metallic grating into its contacts. This serves to increase the incident photon flux about the aperture of the device by guiding incident photons as surface...

  • Concentration dependence of self-interstitial and boron diffusion in silicon. Windl, Wolfgang // Applied Physics Letters;5/19/2008, Vol. 92 Issue 20, p202104 

    We show that recent experimental data and ab initio calculations agree on the charge state as a function of the Fermi energy of the dominant species for diffusion of self-interstitials (+, +, and 0) and boron atoms (+) in silicon. By mapping the experimental data onto the activation energy...

  • Stable fiber-based Fabry-Pérot cavity. Steinmetz, T.; Colombe, Y.; Hunger, D.; Hänsch, T. W.; Balocchi, A.; Warburton, R. J.; Reichel, J. // Applied Physics Letters;9/11/2006, Vol. 89 Issue 11, p111110 

    The development of a fiber-based, tunable optical cavity with open access is reported. The cavity is of the Fabry-Pérot type and is formed with miniature spherical mirrors positioned on the end of single- or multimode optical fibers by a transfer technique, which involves lifting a...

  • Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Rong Lu; Yanhong Wu; Haitao Cheng; Heng Yang; Xinxin Li; Yuelin Wang // Sensors (14248220);2009, Vol. 9 Issue 4, p2470 

    A novel method has been developed to fabricate submicron beams with galvanic etch stop for Si in TMAH. The different Au:Si area ratios before and after the release of the beams are used to trigger the galvanic etch stop to fabricate submicron single crystal Si beams in standard Si wafers. Before...

  • Optical microcavities on Si formed by self-assembled InGaAs/GaAs quantum dot microtubes. Vicknesh, S.; Li, F.; Mi, Z. // Applied Physics Letters;2/23/2009, Vol. 94 Issue 8, p081101 

    We report on the fabrication and emission characteristics of InGaAs/GaAs quantum dot microtube ring resonators on Si substrates achieved using a simple but controllable substrate-on-substrate transfer process. We have observed three-dimensionally confined optical modes, including both radial and...

  • A dynamic view of enzyme catalysis. Aurora Jiménez; Pere Clapés; Ramon Crehuet // Journal of Molecular Modeling;Aug2008, Vol. 14 Issue 8, p735 

    Abstract  Recent experimental advances have shown that enzymes are flexible molecules, and point to a direct link between dynamics and catalysis. Movements span a wide time range, from nano- to milli-seconds. In this paper we introduce two aspects of enzyme flexibility that are treated...

  • SEMICONDUCTOR LASERS UCLA and Intel continue silicon-laser advances. Overton, Gail // Laser Focus World;Apr2005, Vol. 41 Issue 4, p21 

    Reports on the first silicon Raman laser that can be directly modulated. Claim that the silicon Raman laser uses a silicon-on-insulator rib waveguide as the gain medium; Linear relationship between the optical loss in silicon and the free-carrier density in silicon.

  • Lifetime of photogenerated carriers in silicon-on-insulator rib waveguides. Dimitropoulos, D.; Jhaveri, R.; Claps, R.; Woo, J. C. S.; Jalali, B. // Applied Physics Letters;2/14/2005, Vol. 86 Issue 7, p071115 

    The lifetime of photogenerated carriers in silicon-on-insulator rib waveguides is studied in connection with the optical loss they produce via nonlinear absorption. We present an analytical model as well as two-dimensional numerical simulation of carrier transport to elucidate the dependence of...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics