Mechanism of particle removal by megasonic waves

Wonjung Kim; Tae-Hong Kim; Jaehyuck Choi; Ho-Young Kim
February 2009
Applied Physics Letters;2/23/2009, Vol. 94 Issue 8, p081908
Academic Journal
We elucidate the major mechanism of microparticle removal in the megasonic cleaning process through the direct visualization experiments. It is revealed that particles sitting on solids are removed by adjacent microbubbles that oscillate near the substrates and exert interfacial and pressure gradient forces on the particles. Other pressure and streaming effects are shown to be too weak to detach the particles.


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