TITLE

Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning

AUTHOR(S)
Troost, K.Z.; van der Sluis, P.; Gravesteijn, D.J.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/8/1993, Vol. 62 Issue 10, p1110
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the microscale elastic-strain determination using a backscatter Kikuchi diffraction (BKD) in the scanning electron microscope. Significance of the higher-order Laue zone in determining indium layer strain; Effect of gnomonic projection on Kikuchi bands; Application of cross-correlation operation in the poles of BKD patterns.
ACCESSION #
4323010

 

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