TITLE

Simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum

AUTHOR(S)
Hsieh, W.Y.; Lin, J.H.; Chen, L.J.
PUB. DATE
March 1993
SOURCE
Applied Physics Letters;3/8/1993, Vol. 62 Issue 10, p1088
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum deposited halfnium (Hf) and chromium thin films. Use of phosphorus doped oriented silicon wafers in the study; Determination of Hf silicon phase from diffraction patterns; Effect of interfacial reaction barriers on the equilibrium phase.
ACCESSION #
4323001

 

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