Simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum

Hsieh, W.Y.; Lin, J.H.; Chen, L.J.
March 1993
Applied Physics Letters;3/8/1993, Vol. 62 Issue 10, p1088
Academic Journal
Investigates the simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum deposited halfnium (Hf) and chromium thin films. Use of phosphorus doped oriented silicon wafers in the study; Determination of Hf silicon phase from diffraction patterns; Effect of interfacial reaction barriers on the equilibrium phase.


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