X-ray diffraction method for characterization of thin surface layers and thin epitaxial films

Itoh, Nobuo
February 1993
Applied Physics Letters;2/15/1993, Vol. 62 Issue 7, p690
Academic Journal
Focuses on x-ray diffraction method for the characterization of thin surface layers and thin epitaxial films. Importance of characterization in the development of semiconductor devices; Techniques for characterizing thin surface layers; Features of x-ray diffraction technique.


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