TITLE

X-ray diffraction method for characterization of thin surface layers and thin epitaxial films

AUTHOR(S)
Itoh, Nobuo
PUB. DATE
February 1993
SOURCE
Applied Physics Letters;2/15/1993, Vol. 62 Issue 7, p690
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Focuses on x-ray diffraction method for the characterization of thin surface layers and thin epitaxial films. Importance of characterization in the development of semiconductor devices; Techniques for characterizing thin surface layers; Features of x-ray diffraction technique.
ACCESSION #
4322949

 

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