Fourier transform diagnostics of gaseous species during microwave assisted diamond deposition

Campargue, A.; Chenevier, M.; Fayette, L.; Marcus, B.; Mermoux, M.; Ross, A.J.
January 1993
Applied Physics Letters;1/11/1993, Vol. 62 Issue 2, p134
Academic Journal
Examines the gaseous species formed during microwave plasma assisted diamond thin film chemical vapor deposition. Use of Fourier transform spectroscopy; Dissociation of methane in the plasma; Recombination products of the dissociation.


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