TITLE

Application of oxidation to the structural characterization of SiC epitaxial films

AUTHOR(S)
Powell, J.A.; Petit, J.B.; Edgar, J.H.; Jenkins, I.G.; Matus, L.G.; Choyke, W.J.; Clemen, L.; Yoganathan, M.; Yang, J.W.; Pirouz, P.
PUB. DATE
July 1991
SOURCE
Applied Physics Letters;7/8/1991, Vol. 59 Issue 2, p183
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of oxidation on the structural characterization of silicon carbide epitaxial films. Quality and doping levels of crystals; Production of interference colors of oxides on SiC films; Summary of observed oxide interference colors and thicknesses.
ACCESSION #
4322364

 

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